Micro-electro-mechanical systems (MEMS) 1998 : presented at the 1998 International Mechanical Engineering Congress and Exposition : November 15-20, 1998, Anaheim, California
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書誌事項
Micro-electro-mechanical systems (MEMS) 1998 : presented at the 1998 International Mechanical Engineering Congress and Exposition : November 15-20, 1998, Anaheim, California
(DSC, vol. 66)
American Society of Mechanical Engineers, c1998
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Microelectromechanical systems (MEMS)1998
MEMS 1998
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注記
Includes bibliographical references and author index