Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.

Author(s)

• Heuer, A. H. (Arthur Harold)
• Jacobs, S. Joshua

Bibliographic Information

Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.

editors, Arthur H. Heuer, S. Jushua Jacobs

（Materials Research Society symposium proceedings, v. 546）

Materials Research Society, c1999

Note

Includes bibliographical references and indexes

Details

• NCID: BA44647909
• ISBN:
  • 1558994521
• LCCN: 99051976
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale, Pa.
• Pages/Volumes: ix, 246 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA00013775