1999 Symposium on VLSI Technology : digest of technical papers, June 14-16, 1999, Kyoto

Bibliographic Information

1999 Symposium on VLSI Technology : digest of technical papers, June 14-16, 1999, Kyoto

the IEEE Electron Devices Society, the Japan Society of Applied Physics

Business Center for Academic Societites Japan, c1999

  • :softbound
  • :casebound
  • :microfiche

Other Title

99CH36325

Available at  / 4 libraries

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Note

"JSAP cat. no. AP991214"

"IEEE cat no. 99CH36325"

Includes bibliographical references and index

Description and Table of Contents

Description

Papers presented in this symposium on very large scale integration (VLSI) technology cover topics within this field, such as SOI technology, dialectric reliability, channel engineering and DRAM capacitor technology.

by "Nielsen BookData"

Details

  • NCID
    BA44782835
  • ISBN
    • 493081393X
    • 0780354389
    • 0780354397
  • Country Code
    ja
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Tokyo
  • Pages/Volumes
    xvi, 174 p.
  • Size
    ill. ; 29 cm
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