Bibliographic Information

1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : 10 years of advancing the science of semiconductor manufacturing excellence : ASMC 99 proceedings, September 8-10, 1999, Boston, Massachusetts, USA

IEEE Service Center, c1999

  • : soft.
  • : case.

Other Title

99CH36295

99CB36295

Available at  / 1 libraries

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Includes bibliographical references

"IEEE catalog number 99CH36295"

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