Proceedings, IEEE the Thirteenth Annual International Conference on Micro Electro Mechanical Systems : Miyazaki, Japan, January 23-27, 2000

著者

• IEEE Robotics and Automation Society
• IEEE Annual International Conference on Micro Electro Mechanical Systems
• マイクロマシンセンター マイクロマシン センター

書誌事項

Proceedings, IEEE the Thirteenth Annual International Conference on Micro Electro Mechanical Systems : Miyazaki, Japan, January 23-27, 2000

sponsored by the IEEE Robotics and Automation Society in cooperation with the Micromachine Center

IEEE Service Center, 2000

• : soft
• : case
• : micro
• : CD-ROM

タイトル別名

MEMS

MEMS-2000

00CH36308

注記

"IEEE catalog number: 00CH36308"

"IEEE catalog number: 00CH36308C"(CD-ROM)

Includes bibliographical references

• NII書誌ID(NCID): BA45290778
• ISBN:
  • 0780352734
  • 0780352742
  • 0780352750
  • 0780359895
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway, N.J.
• ページ数/冊数: xlv, 810 p.
• 大きさ: 30 cm
• 件名:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Miniature objects -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Robotics -- Congresses