Selected papers on optical MEMS

Author(s)

• Bright, Victor M.

Bibliographic Information

Selected papers on optical MEMS

Victor M. Bright, editor

（SPIE milestone series / Brian J. Thompson, general editor, v. MS 153）

SPIE Optical Engineering Press, c1999

• alk. paper

Note

Includes bibliographical references and indexes

Details

• NCID: BA4559814X
• ISBN:
  • 081943129X
• LCCN: 98045576
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: xvi, 628 p.
• Size: 29 cm
• Classification:
  • LCC : TK7874
  • DC21 : 681/.4
• Subject Headings:
  • LCSH : Microelectronics
  • LCSH : Microelectromechanical systems
• Parent Bibliography ID:
  • BA10810973