Selected papers on optical MEMS
Author(s)
Bibliographic Information
Selected papers on optical MEMS
（SPIE milestone series / Brian J. Thompson, general editor, v. MS 153）
SPIE Optical Engineering Press, c1999
- alk. paper
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Note
Includes bibliographical references and indexes
Description and Table of Contents
Description
A selection of 81 papers on six major topics within the field of optical microelectromechanical systems (MEMS).
Table of Contents
- MEMS technology - review papers on fabrication and various devices
- displays/adaptive optics
- beam steering/scanning
- spectrometers
- communications/switching
- lasers/detectors.
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