Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia

Author(s)

• Bergmann, Neil W.
• Reinhold, Olaf
• Tien, Norman C.
• Society of Photo-optical Instrumentation Engineers
• IREE Society
• Queensland Government State Development

Bibliographic Information

Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia

Neil W. Bergmann, Olaf Reinhold, Norman C. Tien, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society(Australia), Queensland Government State Development(Australia)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3891）

SPIE--the International Society of Optical Engineering, c1999

Note

Includes index

Description and Table of Contents

Description

A selection of 51 papers on various aspects of the electronics and structures used in the field of microelectromechanical systems.

by "Nielsen BookData"

Details

• NCID: BA45648281
• ISBN:
  • 0819434922
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: viii, 428 p.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X