Gate dielectric integrity : material, process, and tool qualification

Author(s)

    • Gupta, Dinesh C.
    • Brown, George A.

Bibliographic Information

Gate dielectric integrity : material, process, and tool qualification

Dinesh C. Gupta and George A. Brown, editors

（ASTM special technical publication, 1382）

ASTM, c2000

Available at  / 2 libraries

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Note

Includes bibliographical references

Related Books： 1-1 of 1

Details

  • NCID
    BA45719619
  • ISBN
    • 0803126158
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    West Conshohocken, PA
  • Pages/Volumes
    xi, 169 p.
  • Size
    23 cm
  • Parent Bibliography ID
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