Maskentechnik für Mikroelektronik-Bausteine : Tagung München, 15. November 1984

Author(s)

• VDI/VDE-Gesellschaft Feinwerktechnik

Bibliographic Information

Maskentechnik für Mikroelektronik-Bausteine : Tagung München, 15. November 1984

VDI/VDE-Gesellschaft Feinwerktechnik

（VDI-Berichte, 555）

VDI, c1985

Note

Includes bibliographies

Details

• NCID: BA45885607
• ISBN:
  • 3180905557
• LCCN: 85203846
• Country Code: gw
• Title Language Code: ger
• Text Language Code: ger
• Place of Publication: Düsseldorf
• Pages/Volumes: 141 p.
• Size: 23 cm
• Classification:
  • LCC : TA3
  • LCC : TK7872.M3
  • DC19 : 620 s
  • DC19 : 621.381/73
• Subject Headings:
  • LCSH : Integrated circuits -- Masks -- Congresses
• Parent Bibliography ID:
  • BA07558548