Optical microlithography XII : 17-19 March 1999, Santa Clara, California

Author(s)

• Van den hove, Luc
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Optical microlithography XII : 17-19 March 1999, Santa Clara, California

Luc Van den hove chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; Cooperating organizations SEMI-Semiconductor Equipment and Materials International

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3679）

SPIE, c1999

• : set
• pt. 1
• pt. 2

Note

Includes bibliographical references and index

Details

• NCID: BA45980437
• ISBN:
  • 0819431532
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: 2 v.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X