Beam injection assessment of defects in semiconductors : proceedings of the 5th workshop on beam injection assessment of defects in semiconductors held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998

著者

• Kittler, M.
• Breitenstein, O.

書誌事項

Beam injection assessment of defects in semiconductors : proceedings of the 5th workshop on beam injection assessment of defects in semiconductors held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998

editors. M. Kittler, O. Breitenstein, A. Endros and W. Schroter

（Diffusion and defect data : solid state data, Pt. B. Solid state phenomena ; v. 63 & 64）

Scitec Publications Ltd., 1998

注記

Volumes 63-64 of Solid State Phenomena, ISSN1012-0394

Includes bibliographies and index

詳細情報

• NII書誌ID(NCID): BA46349537
• ISBN:
  • 390845039X
• 出版国コード: sz
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Uetikon-Zuerich
• ページ数/冊数: xiv, 537 p.
• 大きさ: 25 cm
• 親書誌ID:
  • BA07841800