Ultra clean processing of silicon surfaces : proceedings of the Fourth International Symposium on ultra clean processing of silicon surfaces held in Ostend, Belgium, September 21-23, 1998
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書誌事項
Ultra clean processing of silicon surfaces : proceedings of the Fourth International Symposium on ultra clean processing of silicon surfaces held in Ostend, Belgium, September 21-23, 1998
（Diffusion and defect data : solid state data, Pt. B : Solid State Phenomena ; v. 65 & 66）
Scitec Publications Ltd, c1999
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Volumes 65-66 of Solid State Phenomena, ISSN1012-0394
Includes index