Ultra clean processing of silicon surfaces : proceedings of the Fourth International Symposium on ultra clean processing of silicon surfaces held in Ostend, Belgium, September 21-23, 1998

Author(s)

• Heyns, Marc
• Meuris, Marc
• Mertens, Paul

Bibliographic Information

Ultra clean processing of silicon surfaces : proceedings of the Fourth International Symposium on ultra clean processing of silicon surfaces held in Ostend, Belgium, September 21-23, 1998

editors, Marc Heyns, Marc Meuris and Paul Mertens

（Diffusion and defect data : solid state data, Pt. B : Solid State Phenomena ; v. 65 & 66）

Scitec Publications Ltd, c1999

Note

Volumes 65-66 of Solid State Phenomena, ISSN1012-0394

Includes index

Details

• NCID: BA46355405
• ISBN:
  • 3908450403
• Country Code: sz
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Uetikon-Zuerich
• Pages/Volumes: xiv, 301 p.
• Size: 25 cm
• Parent Bibliography ID:
  • BA07841800