Metal impurities in silicon-device fabrication
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Bibliographic Information
Metal impurities in silicon-device fabrication
（Springer series in materials science, v. 24）
Springer-Verlag, c2000
2nd, revised ed.
Available at / 11 libraries
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The Institute for Solid State Physics Library. The University of Tokyo.図書室
428.41:M17e7210180381
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Includes bibliographical references and index
