Handbook of semiconductor technology
著者
書誌事項
Handbook of semiconductor technology
Wiley-VCH, 2000
- v. 1
- v. 2
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注記
v.1: Electronic structure and properties of semiconductors--Cover
v.2: Processing of semiconductors--Cover
Includes bibliography
内容説明・目次
- 巻冊次
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v. 1 ISBN 9783527298341
内容説明
An in-depth reference work in two volumes on the basic materials for the microelectronics industry. It covers both fundamental research and technological aspects in an area of modern technology where basic science (quantum physics) is of crucial importance for the development of new devices (ULSI technology). Volume 1 covers the structure and properties of semiconductors, with particular emphasis on concepts relevant to semiconductor technology.
目次
- Volume 1: Band theory applied to semiconductors
- electrical and optical characteristics of crystalline semiconductors
- deep centres in semiconductors
- equilibria, nonequilibria, diffusion and precipitation
- dislocation
- grain boundaries
- interfaces
- the hall effect in quantum wires
- material properties of dyrogenated amorphous silicon
- solubility diffusion and gettering of illd transition elements in silicon.
- 巻冊次
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v. 2 ISBN 9783527298358
内容説明
An in-depth reference work in two volumes on the basic materials for the microelectronics industry. It covers both fundamental research and technological aspects in an area of modern technology where basic science (quantum physics) is of crucial importance for the development of new devices (ULSI technology). Volume 2 deals with the enabling materials technology for the electronics industry.
目次
- Volume 2: silicon processing
- compound semiconductors processing
- epitaxial growth
- photolitography
- doping
- etching processes in semiconductor manufacturing
- silicon device structures
- compound semiconductor device structures
- silicon device processing
- compound semiconductor device processing
- integrated circuit packaging
- interconnect systems.
- 巻冊次
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ISBN 9783527299706
内容説明
Semiconductor technology is the basis of today's microelectronics industry with its many impacts on our modern life, i.e. computer and communication technology. This two-volume handbook covers the basics of semiconductor processing technology, which are as essential for the design of new microelectronic devices as the fundamental physics. Volume 1 'Electronic Structure and Properties' covers the structure and properties of semiconductors, with particular emphasis on concepts relevant to semiconductor technology. Volume 2 'Processing of Semiconductors' deals with the enabling materials technology for the electronics industry. World-renowned authors have contributed to this unique treatment of the processing of semiconductors and related technologies. Of interest to physicists and engineers in research and in the electronics industry, this is a valuable reference source and state-of-the-art review by the world's top authors.
目次
VOLUME 1 Band Theory Applied to Semiconductors Electrical and Optical Characteristics of Crystalline Semiconductors Deep Centers in Semiconductors Equilibria, Nonequilibria, Diffusion and Precipitation Dislocation Grain Boundaries Interfaces The Hall Effect in Quantum Wires Material Properties of Hydrogenated Amorphous Silicon Solubility Diffusion and Gettering of Illd Transition Elements in Silicon VOLUME 2 Silicon Processing Compound Semiconductor Processing Epitaxial Growth Photolitography Doping Etching Processes in Semiconductor Manufacturing Silicon Device Structures Compound Semicondutor Device Structures Silicon Device Processing Compound Semiconductor Device Processing Integrated Circuit Packaging Interconnect Systems
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