Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA

著者

• Progler, Christopher J.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA

Christopher J. Progler chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; Cooperating organizations SEMI-Semiconductor Equipment and Materials International SEMATECH

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4000）

SPIE, c2000

• : set
• pt. 1
• pt. 2

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA48017673
• ISBN:
  • 0819436186
  • 0819436186
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: 2 v.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X