Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.

Author(s)

• Merhari, Lhadi

Bibliographic Information

Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.

editors, Lhadi Merhari ... [et al.]

（Materials Research Society symposium proceedings, v. 584）

Materials Research Society, c2000

Note

Includes bibliographical references and indexes

Details

• NCID: BA48300324
• ISBN:
  • 1558994920
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale, Pa.
• Pages/Volumes: xiii, 340 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA00013775