Micromachined transducers sourcebook
著者
書誌事項
Micromachined transducers sourcebook
（McGraw-Hill series in electrical and computer engineering, . Electronics and VLSI circuits）
WCB/McGraw-Hill, c1998
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注記
Includes bibliographical references (p. 883-899) and index
内容説明・目次
内容説明
This is the first textbook to provide a comprehensive overview of the field, beginning with micromachining approaches and then covering all major categories of transduction. The book takes a practical approach to the subject and studies key design issues by examining the fabrication of different devices.
目次
1 Introduction and Overview2 Micromachining Techniques3 Mechanical Transducers4 Optical Transducers5 Ionizing Radiation Transducers6 Thermal Transducers7 Magnetic & Electromagnetic Transducers8 Chemical & Biological Transducers9 Microfluidic Devices
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