1998 International Conference on Ion Implantation Technology proceedings : Ion Implantation Technology-98, Kyoto, Japan, June 22-26, 1998

Author(s)

• International Conference on Ion Implantation Technology
• Matsuo, Jiro
• Takaoka, G.
• 山田, 公 ヤマダ, イサオ

Bibliographic Information

1998 International Conference on Ion Implantation Technology proceedings : Ion Implantation Technology-98, Kyoto, Japan, June 22-26, 1998

editors, J. Matsuo, G. Takaoka, I. Yamada

IEEE Service Center, c1999

• :set. softbound
• v. 1
• v. 2

Other Title

XIIth International Conference on Ion Implantation Technology

iit '98

98EX144

Note

Include author index

IEEE Catalog number: 98EX144

Details

• NCID: BA48879906
• ISBN:
  • 078034538X
• LCCN: 98084232
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Piscataway, NJ
• Pages/Volumes: 2v., xxv, 1276 p.
• Size: 28cm