1998 International Conference on Ion Implantation Technology proceedings : Ion Implantation Technology-98, Kyoto, Japan, June 22-26, 1998
著者
書誌事項
1998 International Conference on Ion Implantation Technology proceedings : Ion Implantation Technology-98, Kyoto, Japan, June 22-26, 1998
IEEE Service Center, c1999
- :set. softbound
- v. 1
- v. 2
- タイトル別名
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XIIth International Conference on Ion Implantation Technology
iit '98
98EX144
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注記
Include author index
IEEE Catalog number: 98EX144
内容説明・目次
内容説明
The aim of this conference was to stimulate and foster discussion of diverse aspects of ion implantation processing from, materials science and device manufacturing to ion beam system design.
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