1998 International Conference on Ion Implantation Technology proceedings : Ion Implantation Technology-98, Kyoto, Japan, June 22-26, 1998
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Bibliographic Information
1998 International Conference on Ion Implantation Technology proceedings : Ion Implantation Technology-98, Kyoto, Japan, June 22-26, 1998
IEEE Service Center, c1999
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XIIth International Conference on Ion Implantation Technology
iit '98
98EX144
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IEEE Catalog number: 98EX144
Description and Table of Contents
Description
The aim of this conference was to stimulate and foster discussion of diverse aspects of ion implantation processing from, materials science and device manufacturing to ion beam system design.
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