Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium

著者

• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Sundaram, K. B.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• Electrochemical Society. High Temperature Materials Division

書誌事項

Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium

editors, K. B. Sundaram ... [et al.] ; Dielectric Science and Technology and Electronics Divisions, and High Temperature Materials Divisions [of the Electrochemical Society]

（Proceedings / [Electrochemical Society], v. 99-6）

Electrochemical Society, c1999

注記

Includes bibliographic references and indexes

詳細情報

• NII書誌ID(NCID): BA4897493X
• ISBN:
  • 1566772281
• LCCN: 99066175
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, New Jersey
• ページ数/冊数: xi, 284 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7872.T55
• 件名:
  • LCSH : Thin film devices -- Congresses
  • LCSH : Silicon nitride -- Congresses
  • LCSH : Silicon dioxide -- Congresses
  • LCSH : Electric insulators and insulation -- Thin films -- Congresses
• 親書誌ID:
  • BA01323290