Microrobotics and microsystem fabrication : 16-17 October 1997, Pittsburgh, Pennsylvania

Author(s)

Bibliographic Information

Microrobotics and microsystem fabrication : 16-17 October 1997, Pittsburgh, Pennsylvania

Armin Sulzmann, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, NIST--National Institute of Standards and Technology, CIMS--Coalition for Intelligent Manufacturing Systems, A-CIMS--Academic Coalition for Intelligent Manufacturing Systems

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 3202)

SPIE, c1998

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Note

Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

Details

  • NCID
    BA49008055
  • ISBN
    • 0819426342
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Bellingham, Wash.
  • Pages/Volumes
    x, 238 p.
  • Size
    28 cm
  • Parent Bibliography ID
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