Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.

著者

• P. de Boer, Maarten

書誌事項

Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.

editors, Maarten P. de Boer ... [et al.]

（Materials Research Society symposium proceedings, v. 605）

Materials Research Society, c2000

タイトル別名

Materials science of microelectromechanical systems (MEMS) devices 2

注記

Includes bibliographical references and indexes

• NII書誌ID(NCID): BA49023729
• ISBN:
  • 1558995137
• LCCN: 00058403
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Warrendale, Pa.
• ページ数/冊数: xiii, 314 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA00013775