Frontiers of thin film technology

著者

• Francombe, Maurice H.
• Wood, C. (Colin)

書誌事項

Frontiers of thin film technology

edited by Maurice H. Francombe ; associate editors, Colin E.C. Wood ... [et al.]

（Thin films, v. 28）

Academic Press, c2001

注記

Includes bibliographical references and index

内容説明・目次

内容説明

Frontiers of Thin Film Technology, Volume 28 focuses on recent developments in those technologies that are critical to the successful growth, fabrication, and characterization of newly emerging solid-state thin film device architectures. Volume 28 is a condensed sampler of the Handbook for use by professional scientists, engineers, and students involved in the materials, design, fabrication, diagnostics, and measurement aspects of these important new devices.

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詳細情報

• NII書誌ID(NCID): BA49381398
• ISBN:
  • 0125330286
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: San Diego ; Tokyo
• ページ数/冊数: xiii, 476 p., [1] p. of plate
• 大きさ: 24 cm
• 件名:
  • LCSH : Thin films
• 親書誌ID:
  • BA25443322