Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA

著者

• Al-Jumaily, Ghanim A.
• Duparré, Angela
• Singh, Bhanwar
• Society of Photo-optical Instrumentation Engineers

書誌事項

Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA

Ghanim A. Al-Jumaily, ... [et al.] chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4099）

SPIE--the International Society for Optical Engineering, c2000

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA49673994
• ISBN:
  • 0819437441
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: ix , 328 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X