Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA

Author(s)

• Al-Jumaily, Ghanim A.
• Duparré, Angela
• Singh, Bhanwar
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA

Ghanim A. Al-Jumaily, ... [et al.] chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4099）

SPIE--the International Society for Optical Engineering, c2000

Note

Includes bibliographical references and index

Details

• NCID: BA49673994
• ISBN:
  • 0819437441
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: ix , 328 p.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X