2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : Advancing the science of semiconductor manufacturing excellence : ASMC 2000 proceedings, September 12-14, 2000, Boston, Massachusetts, USA
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書誌事項
2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : Advancing the science of semiconductor manufacturing excellence : ASMC 2000 proceedings, September 12-14, 2000, Boston, Massachusetts, USA
IEEE Service Center, c2000
- : soft.
- : case.
- タイトル別名
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00CH37072
00CB37072
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注記
Includes bibliographical references
"IEEE catalog number 00CH37072"