Digest of papers 1990, 3rd MicroProcess Conference, July 16-19, 1990, Chiba, Japan
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Bibliographic Information
Digest of papers 1990, 3rd MicroProcess Conference, July 16-19, 1990, Chiba, Japan
Publication Office, Business Center for Academic Societies Japan, c1990
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"Sponspred by The Japan Society of Applied Physics, In cooperation with American Vacuum Society , IEEE Electron Devices Society"--T.p.