ULSI process integration : proceedings of the first international symposium

著者

• Claeys, Cor L.
• Electrochemical Society. Meeting
• International Symposium on ULSI Process Integration

書誌事項

ULSI process integration : proceedings of the first international symposium

editors, C.L. Claeys ... [et al.]

（Proceedings / [Electrochemical Society], v.99-18）

Electrochemical Society, 1999

注記

"Includes papers that were presented at the First Symposium on ULSI Process Integration held in Honolulu, Hawaii at the 196th Meeting of the Electrochemical Society, October 17-22, 1999"--Pref

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA50226971
• ISBN:
  • 1566772419
• LCCN: 99066095
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xiii, 386 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290