Ion implantation into semiconductors, oxides and ceramics : proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16-19 June, 1998

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Ion implantation into semiconductors, oxides and ceramics : proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16-19 June, 1998

edited by J.K.N. Lindner ... [et al.]

（European Materials Research Society symposia proceedings, v. 85）

Elsevier, c1999

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"Reprinted from: Nuclear instruments and methods B, vol. 147/1-4"--T.p. verso

Includes bibliographical references and index

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