MEMS and MOEMS technology and applications

Author(s)

• Rai-Choudhury, P.

Bibliographic Information

MEMS and MOEMS technology and applications

P. Rai-Choudhury ed.

SPIE Press, c2000

Note

Includes bibliographical references and index

Details

• NCID: BA50578811
• ISBN:
  • 0819437166
• LCCN: 00061209
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, WA.
• Pages/Volumes: xi, 520 p.
• Size: 26 cm
• Classification:
  • LCC : TK7875
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems
  • LCSH : Optoelectronic devices