Handbook of diamond technology
著者
書誌事項
Handbook of diamond technology
（Materials science foundations, 8-11）
Trans Tech Pub., c2000
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内容説明・目次
内容説明
This book is the result of twenty years of experience on the fabrication of active micro-cooling systems, the fabrication of electronic devices (radiation and magnetic sensors, transistors), the fabrication of optical devices (new green LED), and the adaptation of silicon simulation software to diamond. This includes the integration of the current transport models of diamond. The book emphasize the subjects' substrate selection, mechanical and chemical structuring, doping, and metallization. Also included is simulation as a tool to predict the results of the technological steps. Though a state of the art method is far behind in comparison to the silicon and gallium arsenide growth we assume the same state as exists in these technologies, namely that the diamond substrates are commercially available.
目次
Preface
Dedication
Table of Contents
1.1 Characterization Techniques: Optical Techniques
1.2 Characterization Techniques: Non-Optical Techniques
2.1 Surface Structuring: Structuring, Polishing, and Etching
2.2 Surface Structuring: Hydrogen Plasma Treatment
3.1 Doping Techniques: Ion Implantation
3.2 Doping Techniques: In Situ Doping
3.3 Doping Techniques: Doping by Diffusion
4.1 Packaging: Phase Diagrams
4.2 Packaging: Metal Contacts on Diamond
4.3 Packaging: Formation Enthalpies of Metal Oxides
4.4 Packaging: Bonding on Diamond
5.1 Numerical Simulation: Electrical Simulation
5.2 Numerical Simulatio: Thermal Simulation of Diamond Heat Spreaders
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