Microsystem technology

著者

• Menz, Wolfgang
• Paul, Oliver
• Mohr, Jürgen

書誌事項

Microsystem technology

W.Menz, J. Mohr, O. Paul

Wiley-VCH, c2001

注記

Bibliography: p. [465]-483

内容説明・目次

内容説明

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

目次

General Introduction to Microstructure Technology. The Parallels to Microelectronics. The Physical and Chemical Basics in Microtechnology. Basic Technologies in MEMS. Lithography. Silicon Microsystem Technology. The LIGA Process. Alternative Processes of Microstructuring. Packaging and Interconnecting Techniques (PIT). System Technology. Literatur.

「Nielsen BookData」 より

• NII書誌ID(NCID): BA50808999
• ISBN:
  • 3527296344
• 出版国コード: gw
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Weinheim ; Cambridge
• ページ数/冊数: xii, 500 p.
• 大きさ: 25 cm
• 分類:
  • DC21 : 620.0011
• 件名:
  • LCSH : Miniature electronic equipment
  • LCSH : Microelectronics
  • LCSH : Micromechanics
  • LCSH : Systems engineering