Microsystem technology
Author(s)
Bibliographic Information
Microsystem technology
Wiley-VCH, c2001
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Note
Bibliography: p. [465]-483
Description and Table of Contents
Description
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
Table of Contents
General Introduction to Microstructure Technology. The Parallels to Microelectronics. The Physical and Chemical Basics in Microtechnology. Basic Technologies in MEMS. Lithography. Silicon Microsystem Technology. The LIGA Process. Alternative Processes of Microstructuring. Packaging and Interconnecting Techniques (PIT). System Technology. Literatur.
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