Microtransducer CAD : physical and computational aspects

著者

書誌事項

Microtransducer CAD : physical and computational aspects

Arokia Nathan, Henry Baltes

（Computational microelectronics）

Springer, c1999

大学図書館所蔵 件 / 全2件

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic" effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry.

目次

  • Introduction
  • Basic Electronic Transport
  • Radiation Effects on Carrier Transport
  • Magnetic-Field Effects on Carrier Transport
  • Thermal Non-Uniformity Effects on Carrier Transport
  • Mechanical Effects on Carrier Transport
  • Mechanical and Fluidic Signals
  • Micro-Actuation
  • Microsystem Simulation.

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