Handbook of chemical vapor deposition (CVD) : principles, technology, and applications

Author(s)

• Pierson, Hugh O.

Bibliographic Information

Handbook of chemical vapor deposition (CVD) : principles, technology, and applications

by Hugh O. Pierson

Noyes Publications, c1999

2nd ed

Other Title

Chemical vapor deposition

Note

Includes bibliographical references and index

***遡及データによる流用入力である

Details

• NCID: BA50973678
• ISBN:
  • 0815514328
• LCCN: 91046658
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Norwich, N.Y., U.S.A.
• Pages/Volumes: xxiv, 482 p.
• Size: 25 cm
• Classification:
  • LCC : TS695
  • DC20 : 671.7/35
• Subject Headings:
  • LCSH : Vapor-plating -- Handbooks, manuals, etc