Mechanical microsensors

Author(s)

• Elwenspoek, M.
• Wiegerink, R.

Bibliographic Information

Mechanical microsensors

M. Elwenspoek, R. Wiegerink

（Microtechnology and MEMS）

Springer-Verlag, c2001

• : gw

Note

"Physics and Astronomy online library"--Half t.p

Includes bibliographical references (p. [274]-290) and index

• NCID: BA51428020
• ISBN:
  • 3540675825
• LCCN: 00057363
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Berlin
• Pages/Volumes: x, 295 p.
• Size: 25 cm
• Classification:
  • LCC : TK7875.E49
  • DC21 : 681/.2
• Subject Headings:
  • LCSH : Detectors -- Design and construction
  • LCSH : Microelectromechanical systems -- Design and construction
  • LCSH : Transducers
  • LCSH : Silicon
  • LCSH : Micromachining
• Parent Bibliography ID:
  • BA51409718