In situ real-time characterization of thin films
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書誌事項
In situ real-time characterization of thin films
（A Wiley-Interscience publication）
J. Wiley, c2001
- : cloth : alk. paper
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
An in-depth look at the state of the art of in situ real-time monitoring and analysis of thin films With thin film deposition becoming increasingly critical in the production of advanced electronic and optical devices, scientists and engineers working in this area are looking for in situ, real-time, structure-specific analytical tools for characterizing phenomena occurring at surfaces and interfaces during thin film growth. This volume brings together contributed chapters from experts in the field, covering proven methods for in situ real-time analysis of technologically important materials such as multicomponent oxides in different environments. Background information and extensive references to the current literature are also provided. Readers will gain a thorough understanding of the growth processes and become acquainted with both emerging and more established methods that can be adapted for in situ characterization.
Methods and their most useful applications include: Low-energy time-of-flight ion scattering and direct recoil spectroscopy (TOF-ISRAS) for studying multicomponent oxide film growth processes Reflection high-energy electron diffraction (RHEED) for determining the nature of chemical reactions at film surfaces Spectrometric ellipsometry (SE) for use in the analysis of semiconductors and other multicomponent materials Reflectance spectroscopy and transmission electron microscopy for monitoring epitaxial growth processes X-ray fluorescence spectroscopy for studying surface and interface structures And other cost-effective techniques for industrial application
目次
- Ion Beam Deposition and Surface Characterization of Thin Multicomponent Oxide Films During Growth (A. Krauss, et al.)
- Reflection High-Energy Electron Diffraction as a Tool for Real-Time Characterization of Growth of Complex Oxides (I. Bozovic, et al.)
- In Situ Real-Time Characterization of Surfaces and Film Growth Processes via Ellipsometry (E. Irene)
- Evaluation of Initial Stages of Heteroepitaxial Growth by Reflectance Spectroscopy and Transmission Electron Microscopy (K. Bachmann & S. Mahajan)
- Laser Reflection Interferometry for In Situ Real-Time Characterization of Film Growth Rate, Surface Roughness, and Optical Absorption. (T. McCauley, et al.)
- X-Ray Reflectivity for Studies of Surface and Interface Structure (E. Chason)
- Curvature-Based Techniques for Real-Time Stress Measurements During Thin-Film Growth (J. Floro & E. Chason)
- Photoelectron Emission Microscopy and Related Techniques for In Situ Real-Time Surface Studies (M. Kordesch)
- Index
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