Copper-fundamental mechanisms for microelectronic applications

Author(s)

• Murarka, S. P.
• Verner, Igor V.
• Gutmann, Ronald J.

Bibliographic Information

Copper-fundamental mechanisms for microelectronic applications

Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann

John Wiley & Sons, c2000

• : cloth

Note

Includes bibliographical references and index

Details

• NCID: BA52043269
• ISBN:
  • 0471252565
• LCCN: 99045535
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xxviii, 337 p.
• Size: 25 cm
• Classification:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Materials
  • LCSH : Copper
  • LCSH : Metallizing
  • LCSH : Semiconductors -- Junctions
  • LCSH : Microelectronics