Micro system technologies 92 : 3rd International Conference on Micro, Electro, Opto, Mechanic Systems and Components, Berlin, October 21-23, 1992

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Micro system technologies 92 : 3rd International Conference on Micro, Electro, Opto, Mechanic Systems and Components, Berlin, October 21-23, 1992

Herbert Reichl, Editor

vde-Verlag, c1992

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注記

Includes bibliographical references and index

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