Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.

Author(s)

• Agarwal, Aditya

Bibliographic Information

Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.

editors, Aditya Agarwal ... [et al.]

（Materials Research Society symposium proceedings, v. 610）

Materials Research Society, c2001

Note

Includes bibliographical references and indexes

Details

• NCID: BA52750594
• ISBN:
  • 1558995188
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale, PA
• Pages/Volumes: 1 v.
• Size: 24 cm
• Parent Bibliography ID:
  • BA00013775