Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.
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Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.
（Materials Research Society symposium proceedings, v. 612）
Materials Research Society, 2001
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Includes bibliographical references and indexes