Handbook of VLSI microlithography : principles, technology, and applications

Author(s)

• Helbert, John N.

Bibliographic Information

Handbook of VLSI microlithography : principles, technology, and applications

edited by John N. Helbert

（Materials science and process technology series）

Noyes Publications/William Andrew Pub., c2001

2nd ed

Note

Includes bibliographical references and index

Details

• NCID: BA53186705
• ISBN:
  • 0815514441
• LCCN: 00028173
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Norwich, NY
• Pages/Volumes: xxi, 1001 p.
• Size: 24 cm
• Classification:
  • LCC : TK7874
  • DC21 : 621.3815/31
• Subject Headings:
  • LCSH : Integrated circuits -- Very large scale integration
  • LCSH : Microlithography
• Parent Bibliography ID:
  • BA04523161