Interconnect and contact metallization for ULSI : proceedings of the international symposium

Author(s)

• Mathad, G. S.
• Arita, Y.
• Electrochemical Society. Dielectric Science and Technology Division

Bibliographic Information

Interconnect and contact metallization for ULSI : proceedings of the international symposium

editors, G.S. Mathad ...[et al.]

（Proceedings / [Electrochemical Society], v. 99-31）

Electrochemical Society, c2000

Note

Includes bibliographies and indexes

Details

• NCID: BA53255987
• ISBN:
  • 1566772540
• LCCN: 00103066
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: ix, 340 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA01323290