Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium

著者

• International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
• Novak, Richard E.
• Shive, L.
• Electrochemical Society. Electronics Division

書誌事項

Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium

editors, R.E. Novak ... [et al.] ; assistant editors, L. Shive ... [et al.]

（Proceedings / [Electrochemical Society], v. 99-36）

Electrochemical Society, c2000

タイトル別名

Cleaning technology in semiconductor device manufacturing VI

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA53256957
• ISBN:
  • 1566772591
• LCCN: 00103107
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xiii, 614 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290