Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium

著者

• International Symposium on Chemical Mechanical Planarization
• Electrochemical Society. Meeting
• Opila, Robert Leon
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division

書誌事項

Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium

editors, R.L. Opila ... [et al.]

（Proceedings / [Electrochemical Society], v. 99-37）

Electrochemical Society, c2000

タイトル別名

Chemical mechanical planarization in integrated circuit device manufacturing III

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA53257304
• ISBN:
  • 1566772605
• LCCN: 00100975
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N. J.
• ページ数/冊数: xii, 644 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290