Silicon epitaxy
著者
書誌事項
Silicon epitaxy
（Semiconductors and semimetals, v. 72）
Academic Press, c2001
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Since its inception in 1966, the series of numbered volumes known as Semiconductors and Semimetals has distinguished itself through the careful selection of well-known authors, editors, and contributors. The Willardson and Beer series, as it is widely known, has succeeded in producing numerous landmark volumes and chapters. Not only did many of these volumes make an impact at the time of their publication, but they continue to be well-cited years after their original release. Recently, Professor Eicke R. Weber of the University of California at Berkeley joined as a co-editor of the series. Professor Weber, a well-known expert in the field of semiconductor materials, will further contribute to continuing the series' tradition of publishing timely, highly relevant, and long-impacting volumes. Some of the recent volumes, such as Hydrogen in Semiconductors, Imperfections in III/V Materials, Epitaxial Microstructures, High-Speed Heterostructure Devices, Oxygen in Silicon, and others promise that this tradition will be maintained and even expanded.
目次
1: CVD Technologies for Silicon: A Quick Survey
2: Epitaxial Growth Theory: Vapor-Phase Chemistry and Doping
3: Epitaxial Growth Facilities, Equipment, and Supplies
4: Epitaxial Growth Techniques
5: Epitaxial Growth Techniques: Molecular Beam Epitaxy
6: Epitaxial Growth Modeling
7: Epitaxial Layer Characterization and Metrology
8: Epitaxy for Discretes and Power Devices
9: Epitaxy on Patterned Wafers
10: Si-Based Alloys: SiGe and SiGe:C
11: Silicon Epitaxy: New Applications
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