2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2001 proceedings, 23-24 April 2001 Munich, Germany

著者

• IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
• Institute of Electrical and Electronics Engineers
• Semiconductor Equipment and Materials International

書誌事項

2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2001 proceedings, 23-24 April 2001 Munich, Germany

IEEE Service Center, c2001

• : soft

タイトル別名

01CH37160

The 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference : ASMC 2001 : factory dynamics, process control, advanced process technology, yield modeling and analysis, defect detection and reduction, April 23-24, International Congress Centre, Munich, Germany

注記

Includes bibliographical references

"IEEE catalog number 01CH37160"--T.p. verso

詳細情報

• NII書誌ID(NCID): BA53827366
• ISBN:
  • 0780365550
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway, NJ
• ページ数/冊数: vii, 244 p.
• 大きさ: 28 cm