2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2001 proceedings, 23-24 April 2001 Munich, Germany
著者
書誌事項
2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2001 proceedings, 23-24 April 2001 Munich, Germany
IEEE Service Center, c2001
- : soft
- タイトル別名
-
01CH37160
The 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference : ASMC 2001 : factory dynamics, process control, advanced process technology, yield modeling and analysis, defect detection and reduction, April 23-24, International Congress Centre, Munich, Germany
大学図書館所蔵 全1件
注記
Includes bibliographical references
"IEEE catalog number 01CH37160"--T.p. verso