Plasma processing XIII : proceedings of the international symposium

著者

• International Symposium on Plasma Processing
• Mathad, G. S.
• Celler, George K.
• Electrochemical Society. Dielectric Science and Technology and Electronocs Divisions

書誌事項

Plasma processing XIII : proceedings of the international symposium

editor, G.S. Mathad ; assistant editors, G.K. Celler ... [et al.] ; [cosponsored by] Dielectric Science and Technology and Electronics Divisions

（Proceedings / [Electrochemical Society], v. 2000-6）

Electrochemical Society, c2000

注記

Includes bibliographical references and indexes

"The symposium, cosponsored by Dielectric Science & Technology and Electronics Divisions, was held as part of the 197th meeting of the Electrochemical Society, Inc. in Tronto, Canada, May 14-19, 2000"--on "Preface"

詳細情報

• NII書誌ID(NCID): BA54323200
• ISBN:
  • 1566772710
• LCCN: 00109733
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: ix, 394 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290