CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition

著者

• International Symposium on Chemical Vapor Deposition
• Allendorf, Mark D.
• Michael, L. Hitchman
• Electrochemical Society. High Temperature Materials Division
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

書誌事項

CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition

editors, Mark D. Allendorf, Michael L. Hitchman

（Proceedings / [Electrochemical Society], v. 2000-13）

Electrochemical Society, c2000

タイトル別名

Chemical Vapor Deposition XV

注記

"The High Temperature Materials, Dierectric Science and Technology, and Electronics Divisions"--on T.p

"... held May 14-18, 2000, in Toronto, Ontario"--on "Preface"

Includes bibliographical references and index

• NII書誌ID(NCID): BA5432745X
• ISBN:
  • 1566772788
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: xi, 810 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290